Advances in technology for maintaining air cleanliness are largely due to improved filter performance; ULPA filters can remove particles as small as 0.1 μm. In practice, clean rooms employ a combination of several filters as a cost-saving measure. In addition to improved filter performance, fundamental technologies such as those that prevent contaminants from leaking past filter frames and those that regulate uneven airflow within rooms are also critical.

Fan Filter Unit (Ceiling)

This device consists of an air filter and a fan for flowing purified air in a single direction into a clean room.

Types of available air filters

This filter removes particles with a diameter of more than 5 μm.

The collection efficiency is 99.97% or more for 0.3-μm particles.

This filter is designed to remove gas molecules.

Fan Filter Unit (Circulation)

The device reuses air emitted from the clean room by further reducing the concentration of chemical contaminants for purification then supplying the purified air to the wafer storage area.

Types of available air filters

This filter removes particles with a diameter of more than 5 μm.

The collection efficiency is 99.97% or more for 0.3-μm particles.

This filter is designed to remove gas molecules.

Air Handling Unit

An Air Handling Unit (AHU) consists of air blowers (fans), heat exchangers (coils), humidifiers, air filters and a casing. AHUs are primarily used in large air-conditioning systems.

Types of available air filters

This filter removes particles with a diameter of more than 5 μm.

This long-lasting, pleated filter removes particles with a diameter of more than 5 μm.

This filter has a medium collection efficiency for particles with a diameter less than 5 μm.

Capable of dealing with a variety of gaseous substances within the air, this product offers superior purification performance.

Air Shower

This device uses high-speed purified air to remove dust and other particles adhered to the surfaces of people and objects before they enter the clean room. This prevents contaminants from entering the controlled clean space.

Types of available air filters

This filter removes particles with a diameter of more than 5 μm.

The collection efficiency is 99.97% or more for 0.3-μm particles.

Clean Booth

This is a highly sterile area within a clean room that is kept clean via either the turbulent or laminar flow method.

Types of available air filters

This filter removes particles with a diameter of more than 5 μm.

The collection efficiency is 99.97% or more for 0.3-μm particles.

Clean Bench

This economical device keeps the top surface of a workbench at the cleanest possible state.

Types of available air filters

This filter removes particles with a diameter of more than 5 μm.

The collection efficiency is 99.97% or more for 0.3-μm particles.

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